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Rutherford Backscattering Spectrometry Ions with an incident energy E0 are backscattered at an angle q from an surface atom of mass Mi with the energy Ei = Ki*E0. The kinematic factor Ki=(MIoncosq + [(Mi2 - M 2Ion sin2q]1/2)2 / (MIon+Mi)2 connects incident and backscattered energy and is the basic quantity for the mass separation. Backscattered ions from a certain depth t have a reduced energy Ei( t ) =Ki*E0 - DE ( t ) taking into consideration the energy loss DE ( t ) of the projectile ion and the backscattered ion in the target. Thus, the energy scale represents a depth scale; the basic relation for the analysis of layer structured materials and thin films. |
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